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Semiconductor Industry Alumina Ceramic Robotic Arm

Semiconductor Industry Alumina Ceramic Robotic Arm

Semiconductor Industry Alumina Ceramic Robotic Arm Puwei's Alumina Ceramic Robotic Arm represents the pinnacle of precision automation components for semiconductor manufacturing. Engineered from high-purity alumina ceramic, this critical component delivers exceptional performance in cleanroom environments where precision, reliability, and contamination control are paramount. Technical Specifications Material Properties Base Material: High-Purity Alumina Ceramic (Al₂O₃) Purity Level: ≥ 99.6% Density: 3.8-3.9 g/cm³ Hardness: ≥ 80 HRA Surface Roughness: Ra ≤ 0.2 μm Performance Characteristics Operating Temperature: -50°C to 1500°C Thermal Expansion Coefficient: 7.2×10⁻⁶/°C Dielectric Strength: 15-20 kV/mm Volume Resistivity: >10¹⁴ Ω·cm Compressive Strength: >2500 MPa Design Specifications Wafer Compatibility: 150mm, 200mm, 300mm Positioning Accuracy: ±0.1 mm Cleanroom Class: Class 1-100 compatible Chemical Resistance: Excellent against acids and alkalis Non-magnetic…